Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior.

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Title: Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior.
Authors: Kim, Haneul1,2 (AUTHOR), Kim, Jungyeon1,2 (AUTHOR), Kang, Young Woo1,2,3 (AUTHOR), Lee, Taeho2,4 (AUTHOR), Kim, Min-Woo1,3 (AUTHOR), Ha, Tae Joong2,4 (AUTHOR), Oh, Hye-Keun3 (AUTHOR), Ahn, Jinho1,2,4 (AUTHOR) jhahn@hanyang.ac.kr
Source: Materials (1996-1944). Jan2026, Vol. 19 Issue 1, p56. 14p.
Database: Academic Search Ultimate
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An: 190787062
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  Data: Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior.
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  Data: <searchLink fieldCode="AR" term="%22Kim%2C+Haneul%22">Kim, Haneul</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kim%2C+Jungyeon%22">Kim, Jungyeon</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kang%2C+Young+Woo%22">Kang, Young Woo</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lee%2C+Taeho%22">Lee, Taeho</searchLink><relatesTo>2,4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kim%2C+Min-Woo%22">Kim, Min-Woo</searchLink><relatesTo>1,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ha%2C+Tae+Joong%22">Ha, Tae Joong</searchLink><relatesTo>2,4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Oh%2C+Hye-Keun%22">Oh, Hye-Keun</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ahn%2C+Jinho%22">Ahn, Jinho</searchLink><relatesTo>1,2,4</relatesTo> (AUTHOR)<i> jhahn@hanyang.ac.kr</i>
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  Data: <searchLink fieldCode="JN" term="%22Materials+%281996-1944%29%22">Materials (1996-1944)</searchLink>. Jan2026, Vol. 19 Issue 1, p56. 14p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=190787062
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        Value: 10.3390/ma19010056
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      – Code: eng
        Text: English
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        PageCount: 14
        StartPage: 56
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      – TitleFull: Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior.
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            NameFull: Kim, Haneul
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            NameFull: Kim, Min-Woo
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              Text: Jan2026
              Type: published
              Y: 2026
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