Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior.
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| Title: | Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior. |
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| Authors: | Kim, Haneul1,2 (AUTHOR), Kim, Jungyeon1,2 (AUTHOR), Kang, Young Woo1,2,3 (AUTHOR), Lee, Taeho2,4 (AUTHOR), Kim, Min-Woo1,3 (AUTHOR), Ha, Tae Joong2,4 (AUTHOR), Oh, Hye-Keun3 (AUTHOR), Ahn, Jinho1,2,4 (AUTHOR) jhahn@hanyang.ac.kr |
| Source: | Materials (1996-1944). Jan2026, Vol. 19 Issue 1, p56. 14p. |
| Database: | Academic Search Ultimate |
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