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Analysis of Anisotropic Etching Characteristics and Morphology Simulation of Crystal Silicon.

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Bibliographic Details
Title: Analysis of Anisotropic Etching Characteristics and Morphology Simulation of Crystal Silicon.
Authors: ZHANG, Hui1,2 zhanghui_ccc@163.com, QIAN, Jun1
Source: Journal of Synthetic Crystals. Feb2026, Vol. 55 Issue 2, p241-252. 12p.
Database: Academic Search Ultimate
Description
ISSN:1000985X
DOI:10.16553/j.cnki.issn1000-985x.2025.0211