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Analysis of Anisotropic Etching Characteristics and Morphology Simulation of Crystal Silicon.

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Title: Analysis of Anisotropic Etching Characteristics and Morphology Simulation of Crystal Silicon.
Authors: ZHANG, Hui1,2 zhanghui_ccc@163.com, QIAN, Jun1
Source: Journal of Synthetic Crystals. Feb2026, Vol. 55 Issue 2, p241-252. 12p.
Database: Academic Search Ultimate
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DbLabel: Academic Search Ultimate
An: 192130983
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Analysis of Anisotropic Etching Characteristics and Morphology Simulation of Crystal Silicon.
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  Data: <searchLink fieldCode="AR" term="%22ZHANG%2C+Hui%22">ZHANG, Hui</searchLink><relatesTo>1,2</relatesTo><i> zhanghui_ccc@163.com</i><br /><searchLink fieldCode="AR" term="%22QIAN%2C+Jun%22">QIAN, Jun</searchLink><relatesTo>1</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Synthetic+Crystals%22">Journal of Synthetic Crystals</searchLink>. Feb2026, Vol. 55 Issue 2, p241-252. 12p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=192130983
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.16553/j.cnki.issn1000-985x.2025.0211
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 12
        StartPage: 241
    Titles:
      – TitleFull: Analysis of Anisotropic Etching Characteristics and Morphology Simulation of Crystal Silicon.
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            NameFull: ZHANG, Hui
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            NameFull: QIAN, Jun
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            – D: 01
              M: 02
              Text: Feb2026
              Type: published
              Y: 2026
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            – TitleFull: Journal of Synthetic Crystals
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