Repetitive Operation of A Dense Plasma Soft X-ray Source for Micromachining.
Saved in:
| Title: | Repetitive Operation of A Dense Plasma Soft X-ray Source for Micromachining. |
|---|---|
| Authors: | Wong, D.1, Tan, T. L.1, Patran, A.1, Hassan, S. M.1, Zhang, T.1, Springham, S. V.1, Lee, S.1, Rawat, R. S.1, Lee, P.1 |
| Source: | AIP Conference Proceedings. 2006, Vol. 808 Issue 1, p227-230. 4p. |
| Database: | Academic Search Ultimate |
| ISSN: | 0094243X |
|---|---|
| DOI: | 10.1063/1.2159359 |
