View in EDS

Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF4 Plasmas.

Saved in:
Bibliographic Details
Title: Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF4 Plasmas.
Authors: Li, Xin‐Yang1 (AUTHOR), Zhang, Yu‐Ru1 (AUTHOR) yrzhang@dlut.edu.cn, Wang, You‐Nian1 (AUTHOR)
Source: Plasma Processes & Polymers. Mar2026, Vol. 23 Issue 3, p1-13. 13p.
Database: Academic Search Ultimate
Description
ISSN:16128850
DOI:10.1002/ppap.70100