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Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF4 Plasmas.

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Title: Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF4 Plasmas.
Authors: Li, Xin‐Yang1 (AUTHOR), Zhang, Yu‐Ru1 (AUTHOR) yrzhang@dlut.edu.cn, Wang, You‐Nian1 (AUTHOR)
Source: Plasma Processes & Polymers. Mar2026, Vol. 23 Issue 3, p1-13. 13p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 192505647
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF<subscript>4</subscript> Plasmas.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Li%2C+Xin‐Yang%22">Li, Xin‐Yang</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhang%2C+Yu‐Ru%22">Zhang, Yu‐Ru</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> yrzhang@dlut.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Wang%2C+You‐Nian%22">Wang, You‐Nian</searchLink><relatesTo>1</relatesTo> (AUTHOR)
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Plasma+Processes+%26+Polymers%22">Plasma Processes & Polymers</searchLink>. Mar2026, Vol. 23 Issue 3, p1-13. 13p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=192505647
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1002/ppap.70100
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 13
        StartPage: 1
    Titles:
      – TitleFull: Two‐Dimensional Fluid‐Analytical Hybrid Modelling of the Electromagnetic Effects in Very High Frequency Capacitively Coupled Ar/CF4 Plasmas.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Li, Xin‐Yang
      – PersonEntity:
          Name:
            NameFull: Zhang, Yu‐Ru
      – PersonEntity:
          Name:
            NameFull: Wang, You‐Nian
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 03
              Text: Mar2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 16128850
          Numbering:
            – Type: volume
              Value: 23
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Plasma Processes & Polymers
              Type: main
ResultId 1