An electric characterization method for identifying the number and position of unintended defect dots formed in silicon quantum dot devices.

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Bibliographic Details
Title: An electric characterization method for identifying the number and position of unintended defect dots formed in silicon quantum dot devices.
Authors: Chiashi, Yusuke1 (AUTHOR) yusuke.chiashi@aist.go.jp, Kato, Kimihiko1 (AUTHOR), Iba, Yoshihisa1 (AUTHOR), Oka, Hiroshi1 (AUTHOR), Iizuka, Shota1 (AUTHOR), Asai, Hidehiro1 (AUTHOR), Ogura, Minoru1 (AUTHOR), Inaba, Takumi1 (AUTHOR), Mori, Takahiro1 (AUTHOR) yusuke.chiashi@aist.go.jp
Source: APL Electronic Devices. Mar2026, Vol. 2 Issue 1, p1-6. 6p.
Database: Academic Search Ultimate
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ISSN:29958423
DOI:10.1063/5.0312498