View in EDS HTML Full Text PDF Full Text

PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates.

Saved in:

Bibliographic Details
Title:	PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates.
Authors:	Nakamura, Kae^1,2 (AUTHOR), Huang, Chi-Luen^2,3 (AUTHOR), Habib Akhyari, Ali^1,2,3 (AUTHOR), Argüelles, Andrea P.^2,3,4 (AUTHOR), Jackson, Thomas N.^1,4 (AUTHOR), Trolier-McKinstry, Susan^1,2 (AUTHOR)
Source:	Sensors (14248220). Apr2026, Vol. 26 Issue 7, p2246. 12p.
Database:	Academic Search Ultimate
Full text is not displayed to guests. Login for full access.

Description
ISSN:	14248220
DOI:	10.3390/s26072246