Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.
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| Title: | Metal-assisted chemical etching for controllable fabrication of silicon nanochannels. |
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| Authors: | Chen, Zixiu1 (AUTHOR), An, Nan1 (AUTHOR), Miao, Longfei2 (AUTHOR) longfei@jxnu.edu.cn, Zhang, Yuping3 (AUTHOR) zhangyuping@gem.com.cn, Zhai, Yueming1 (AUTHOR) lwang@jxnu.edu.cn |
| Source: | Nanotechnology. 2026, Vol. 37 Issue 17, p1-11. 11p. |
| Database: | Academic Search Ultimate |
| ISSN: | 09574484 |
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| DOI: | 10.1088/1361-6528/ae607e |
