View in EDS

Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.

Saved in:
Bibliographic Details
Title: Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.
Authors: Chen, Zixiu1 (AUTHOR), An, Nan1 (AUTHOR), Miao, Longfei2 (AUTHOR) longfei@jxnu.edu.cn, Zhang, Yuping3 (AUTHOR) zhangyuping@gem.com.cn, Zhai, Yueming1 (AUTHOR) lwang@jxnu.edu.cn
Source: Nanotechnology. 2026, Vol. 37 Issue 17, p1-11. 11p.
Database: Academic Search Ultimate
FullText Text:
  Availability: 0
Header DbId: asn
DbLabel: Academic Search Ultimate
An: 193284706
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Chen%2C+Zixiu%22">Chen, Zixiu</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22An%2C+Nan%22">An, Nan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Miao%2C+Longfei%22">Miao, Longfei</searchLink><relatesTo>2</relatesTo> (AUTHOR)<i> longfei@jxnu.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Zhang%2C+Yuping%22">Zhang, Yuping</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> zhangyuping@gem.com.cn</i><br /><searchLink fieldCode="AR" term="%22Zhai%2C+Yueming%22">Zhai, Yueming</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> lwang@jxnu.edu.cn</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Nanotechnology%22">Nanotechnology</searchLink>. 2026, Vol. 37 Issue 17, p1-11. 11p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=193284706
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1088/1361-6528/ae607e
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 11
        StartPage: 1
    Titles:
      – TitleFull: Metal-assisted chemical etching for controllable fabrication of silicon nanochannels.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Chen, Zixiu
      – PersonEntity:
          Name:
            NameFull: An, Nan
      – PersonEntity:
          Name:
            NameFull: Miao, Longfei
      – PersonEntity:
          Name:
            NameFull: Zhang, Yuping
      – PersonEntity:
          Name:
            NameFull: Zhai, Yueming
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 05
              Text: 2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 09574484
          Numbering:
            – Type: volume
              Value: 37
            – Type: issue
              Value: 17
          Titles:
            – TitleFull: Nanotechnology
              Type: main
ResultId 1