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Research on Plasma Characteristics of High-Power Impulse Magnetron Sputtering Ti-Nb-Cr Target and Its Effect on Film Properties.

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Title: Research on Plasma Characteristics of High-Power Impulse Magnetron Sputtering Ti-Nb-Cr Target and Its Effect on Film Properties.
Authors: Chen, Changzi1 (AUTHOR), Li, Yantao2 (AUTHOR), Ma, Donglin3 (AUTHOR), Jiang, Quanxin1 (AUTHOR), Peng, Jingjing1,2 (AUTHOR), Wang, Jianfei1,3 (AUTHOR) wangjianfeiimr@ustc.edu
Source: Materials (1996-1944). May2026, Vol. 19 Issue 9, p1710. 15p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 193715516
AccessLevel: 2
PubType: Academic Journal
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  Data: Research on Plasma Characteristics of High-Power Impulse Magnetron Sputtering Ti-Nb-Cr Target and Its Effect on Film Properties.
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  Data: <searchLink fieldCode="AR" term="%22Chen%2C+Changzi%22">Chen, Changzi</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Li%2C+Yantao%22">Li, Yantao</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Ma%2C+Donglin%22">Ma, Donglin</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Jiang%2C+Quanxin%22">Jiang, Quanxin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Peng%2C+Jingjing%22">Peng, Jingjing</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Jianfei%22">Wang, Jianfei</searchLink><relatesTo>1,3</relatesTo> (AUTHOR)<i> wangjianfeiimr@ustc.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22Materials+%281996-1944%29%22">Materials (1996-1944)</searchLink>. May2026, Vol. 19 Issue 9, p1710. 15p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=193715516
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.3390/ma19091710
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      – Code: eng
        Text: English
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        PageCount: 15
        StartPage: 1710
    Titles:
      – TitleFull: Research on Plasma Characteristics of High-Power Impulse Magnetron Sputtering Ti-Nb-Cr Target and Its Effect on Film Properties.
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            NameFull: Chen, Changzi
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            NameFull: Li, Yantao
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            NameFull: Ma, Donglin
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            NameFull: Jiang, Quanxin
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            NameFull: Peng, Jingjing
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            NameFull: Wang, Jianfei
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            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
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            – Type: issn-print
              Value: 19961944
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              Value: 19
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              Value: 9
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            – TitleFull: Materials (1996-1944)
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