Hillock formation on high-temperature annealed AlN templates due to dislocation nucleation at AlON particles.
Saved in:
| Title: | Hillock formation on high-temperature annealed AlN templates due to dislocation nucleation at AlON particles. |
|---|---|
| Authors: | Lachowski, A.1 artur@unipress.waw.pl, Remmele, T.2, Kwasniewski, A.2, Hartmann, C.2, Żak, M.1, Smalc-Koziorowska, J.1, Petkovic, M.2, Albrecht, M.2, Schulz, T.2 |
| Source: | Applied Physics Letters. 5/18/2025, Vol. 128 Issue 20, p1-7. 7p. |
| Database: | Academic Search Ultimate |
| ISSN: | 00036951 |
|---|---|
| DOI: | 10.1063/5.0329728 |
