Scaling of Phase Change Memory Cell: Reducing Contact Size Beyond the Limit of Lithography.
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| Title: | Scaling of Phase Change Memory Cell: Reducing Contact Size Beyond the Limit of Lithography. |
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| Authors: | Chen, Yuqing1,2 (AUTHOR), Wang, Ruobing1 (AUTHOR), Song, Sannian1 (AUTHOR), Song, Zhitang1 (AUTHOR) ztsong@mail.sim.ac.cn, Zhou, Xilin1 (AUTHOR) xilinzhou@mail.sim.ac.cn |
| Source: | Physica Status Solidi - Rapid Research Letters. May2026, Vol. 20 Issue 5, p1-15. 15p. |
| Database: | Academic Search Ultimate |
| ISSN: | 18626254 |
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| DOI: | 10.1002/pssr.202500489 |
