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Scaling of Phase Change Memory Cell: Reducing Contact Size Beyond the Limit of Lithography.

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Title: Scaling of Phase Change Memory Cell: Reducing Contact Size Beyond the Limit of Lithography.
Authors: Chen, Yuqing1,2 (AUTHOR), Wang, Ruobing1 (AUTHOR), Song, Sannian1 (AUTHOR), Song, Zhitang1 (AUTHOR) ztsong@mail.sim.ac.cn, Zhou, Xilin1 (AUTHOR) xilinzhou@mail.sim.ac.cn
Source: Physica Status Solidi - Rapid Research Letters. May2026, Vol. 20 Issue 5, p1-15. 15p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 194136295
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Scaling of Phase Change Memory Cell: Reducing Contact Size Beyond the Limit of Lithography.
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  Data: <searchLink fieldCode="AR" term="%22Chen%2C+Yuqing%22">Chen, Yuqing</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wang%2C+Ruobing%22">Wang, Ruobing</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Song%2C+Sannian%22">Song, Sannian</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Song%2C+Zhitang%22">Song, Zhitang</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> ztsong@mail.sim.ac.cn</i><br /><searchLink fieldCode="AR" term="%22Zhou%2C+Xilin%22">Zhou, Xilin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> xilinzhou@mail.sim.ac.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Physica+Status+Solidi+-+Rapid+Research+Letters%22">Physica Status Solidi - Rapid Research Letters</searchLink>. May2026, Vol. 20 Issue 5, p1-15. 15p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=194136295
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1002/pssr.202500489
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      – Code: eng
        Text: English
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        PageCount: 15
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      – TitleFull: Scaling of Phase Change Memory Cell: Reducing Contact Size Beyond the Limit of Lithography.
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          Name:
            NameFull: Chen, Yuqing
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            NameFull: Wang, Ruobing
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            NameFull: Song, Sannian
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            NameFull: Song, Zhitang
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            NameFull: Zhou, Xilin
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            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
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              Value: 18626254
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              Value: 20
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              Value: 5
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            – TitleFull: Physica Status Solidi - Rapid Research Letters
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