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A Study on Condition-Based Maintenance for Wafer Table Edge Degradation in Photolithography Equipment.

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Bibliographic Details
Title: A Study on Condition-Based Maintenance for Wafer Table Edge Degradation in Photolithography Equipment.
Authors: Joo, Kyunghwan1,2 (AUTHOR), Lee, Kwang Hoon2,3 (AUTHOR), Jeon, Jae Wook1,3 (AUTHOR) jwjeon@skku.edu
Source: Sensors (14248220). Jun2026, Vol. 26 Issue 12, p3650. 19p.
Database: Academic Search Ultimate
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ISSN:14248220
DOI:10.3390/s26123650