View in EDS HTML Full Text PDF Full Text

A Study on Condition-Based Maintenance for Wafer Table Edge Degradation in Photolithography Equipment.

Saved in:
Bibliographic Details
Title: A Study on Condition-Based Maintenance for Wafer Table Edge Degradation in Photolithography Equipment.
Authors: Joo, Kyunghwan1,2 (AUTHOR), Lee, Kwang Hoon2,3 (AUTHOR), Jeon, Jae Wook1,3 (AUTHOR) jwjeon@skku.edu
Source: Sensors (14248220). Jun2026, Vol. 26 Issue 12, p3650. 19p.
Database: Academic Search Ultimate
Full text is not displayed to guests.
FullText Links:
  – Type: pdflink
Text:
  Availability: 1
Header DbId: asn
DbLabel: Academic Search Ultimate
An: 194914049
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: A Study on Condition-Based Maintenance for Wafer Table Edge Degradation in Photolithography Equipment.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Joo%2C+Kyunghwan%22">Joo, Kyunghwan</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lee%2C+Kwang+Hoon%22">Lee, Kwang Hoon</searchLink><relatesTo>2,3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Jeon%2C+Jae+Wook%22">Jeon, Jae Wook</searchLink><relatesTo>1,3</relatesTo> (AUTHOR)<i> jwjeon@skku.edu</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Sensors+%2814248220%29%22">Sensors (14248220)</searchLink>. Jun2026, Vol. 26 Issue 12, p3650. 19p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=194914049
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.3390/s26123650
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 19
        StartPage: 3650
    Titles:
      – TitleFull: A Study on Condition-Based Maintenance for Wafer Table Edge Degradation in Photolithography Equipment.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Joo, Kyunghwan
      – PersonEntity:
          Name:
            NameFull: Lee, Kwang Hoon
      – PersonEntity:
          Name:
            NameFull: Jeon, Jae Wook
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 06
              Text: Jun2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 14248220
          Numbering:
            – Type: volume
              Value: 26
            – Type: issue
              Value: 12
          Titles:
            – TitleFull: Sensors (14248220)
              Type: main
ResultId 1