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Evaluation of surface topography and microstructure of electroplated copper ultraprecision-machined with a single-crystal diamond tool.

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Bibliographic Details
Title: Evaluation of surface topography and microstructure of electroplated copper ultraprecision-machined with a single-crystal diamond tool.
Authors: Takino, Hideo1 (AUTHOR) takino.hideo@it-chiba.ac.jp, Aizawa, Hidenori2 (AUTHOR), Kanaoka, Masahiko3 (AUTHOR)
Source: Journal of the European Optical Society. 2026, Vol. 22 Issue 1, p1-9. 9p.
Database: Academic Search Ultimate
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Description
ISSN:19902573
DOI:10.1051/jeos/2026030