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Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range.

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Bibliographic Details
Title: Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range.
Authors: Siefke, Thomas1,2,3 (AUTHOR) thomas.siefke@uni-jena.de, Gerold, Kristin1,2 (AUTHOR), Shestaeva, Svetlana2 (AUTHOR), Paul, Pallabi1,2 (AUTHOR), Alam, Shawon4 (AUTHOR), Franta, Daniel5 (AUTHOR), Szeghalmi, Adriana1,2 (AUTHOR), Schröder, Sven2 (AUTHOR), Kroker, Stefanie6,7,8 (AUTHOR)
Source: Journal of the European Optical Society. 2026, Vol. 22 Issue 1, p1-5. 5p.
Database: Academic Search Ultimate
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Description
ISSN:19902573
DOI:10.1051/jeos/2026036