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Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range.

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Title: Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range.
Authors: Siefke, Thomas1,2,3 (AUTHOR) thomas.siefke@uni-jena.de, Gerold, Kristin1,2 (AUTHOR), Shestaeva, Svetlana2 (AUTHOR), Paul, Pallabi1,2 (AUTHOR), Alam, Shawon4 (AUTHOR), Franta, Daniel5 (AUTHOR), Szeghalmi, Adriana1,2 (AUTHOR), Schröder, Sven2 (AUTHOR), Kroker, Stefanie6,7,8 (AUTHOR)
Source: Journal of the European Optical Society. 2026, Vol. 22 Issue 1, p1-5. 5p.
Database: Academic Search Ultimate
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  Data: Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range.
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  Data: <searchLink fieldCode="AR" term="%22Siefke%2C+Thomas%22">Siefke, Thomas</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<i> thomas.siefke@uni-jena.de</i><br /><searchLink fieldCode="AR" term="%22Gerold%2C+Kristin%22">Gerold, Kristin</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Shestaeva%2C+Svetlana%22">Shestaeva, Svetlana</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Paul%2C+Pallabi%22">Paul, Pallabi</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Alam%2C+Shawon%22">Alam, Shawon</searchLink><relatesTo>4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Franta%2C+Daniel%22">Franta, Daniel</searchLink><relatesTo>5</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Szeghalmi%2C+Adriana%22">Szeghalmi, Adriana</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Schröder%2C+Sven%22">Schröder, Sven</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kroker%2C+Stefanie%22">Kroker, Stefanie</searchLink><relatesTo>6,7,8</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+European+Optical+Society%22">Journal of the European Optical Society</searchLink>. 2026, Vol. 22 Issue 1, p1-5. 5p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=195367001
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        Value: 10.1051/jeos/2026036
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        Text: English
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      – TitleFull: Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range.
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              Text: 2026
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