Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range.
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| Title: | Atomic layer deposition for hafnium oxide-based meta-optics in the ultraviolet spectral range. |
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| Authors: | Siefke, Thomas1,2,3 (AUTHOR) thomas.siefke@uni-jena.de, Gerold, Kristin1,2 (AUTHOR), Shestaeva, Svetlana2 (AUTHOR), Paul, Pallabi1,2 (AUTHOR), Alam, Shawon4 (AUTHOR), Franta, Daniel5 (AUTHOR), Szeghalmi, Adriana1,2 (AUTHOR), Schröder, Sven2 (AUTHOR), Kroker, Stefanie6,7,8 (AUTHOR) |
| Source: | Journal of the European Optical Society. 2026, Vol. 22 Issue 1, p1-5. 5p. |
| Database: | Academic Search Ultimate |
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