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Improving UV Stability of SiO 2 /SiN x -Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth.

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Title: Improving UV Stability of SiO 2 /SiN x -Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth.
Authors: Getz, Michael N.1 (AUTHOR) michael.getz@sintef.no, Koybasi, Ozhan1,2 (AUTHOR), Edhborg, Fredrik2,3 (AUTHOR), Nordseth, Ørnulf3,4 (AUTHOR), Hesse, Steven4,5 (AUTHOR), Pohl, Tobias4,6 (AUTHOR), Povoli, Marco1 (AUTHOR), Källberg, Stefan2 (AUTHOR), Werner, Lutz3,4 (AUTHOR), Ikonen, Erkki4,5 (AUTHOR), Gran, Jarle5,6 (AUTHOR)
Source: Sensors (14248220). Jul2026, Vol. 26 Issue 13, p3991. 17p.
Database: Academic Search Ultimate
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ISSN:14248220
DOI:10.3390/s26133991