APA (7th ed.) Citation

Getz, M. N., Koybasi, O., Edhborg, F., Nordseth, Ø., Hesse, S., Pohl, T., . . . Gran, J. (2026). Improving UV Stability of SiO 2 /SiN x -Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth. Sensors (14248220), 26(13), 3991. https://doi.org/10.3390/s26133991

Chicago Style (17th ed.) Citation

Getz, Michael N., et al. "Improving UV Stability of SiO 2 /SiN X -Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth." Sensors (14248220) 26, no. 13 (2026): 3991. https://doi.org/10.3390/s26133991.

MLA (9th ed.) Citation

Getz, Michael N., et al. "Improving UV Stability of SiO 2 /SiN X -Passivated Silicon Photodiodes Through Shallow Junction Implantation and Oxide Regrowth." Sensors (14248220), vol. 26, no. 13, 2026, p. 3991, https://doi.org/10.3390/s26133991.