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Nondestructive microstructural diagnostic of integrated ferroelectric capacitor arrays: Correlation with electrical characteristics.

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Bibliographic Details
Title: Nondestructive microstructural diagnostic of integrated ferroelectric capacitor arrays: Correlation with electrical characteristics.
Authors: Muller, Ch.1 christophe.muller@l2mp.fr, Menou, N.1, Barrett, R.2, Save, D.3
Source: Journal of Applied Physics. 3/1/2006, Vol. 99 Issue 5, p054504. 5p. 1 Diagram, 4 Graphs.
Database: Academic Search Ultimate
Description
ISSN:00218979
DOI:10.1063/1.2176110