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TRANSPARENT TITANIUM DIOXIDE THIN FILM DEPOSITED BY PLASMA-ENHANCED ATOMIC LAYER DEPOSITION.

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Bibliographic Details
Title: TRANSPARENT TITANIUM DIOXIDE THIN FILM DEPOSITED BY PLASMA-ENHANCED ATOMIC LAYER DEPOSITION.
Authors: Liu, G. X.1, Shan, F. K.1, Lee, W. J.1 leewj@deu.ac.kr, Lee, G. H.1, Kim, I. S.1, Shin, B. C.1, Yoon, S. G.2, Cho, C. R.3
Source: Integrated Ferroelectrics. 2006, Vol. 81 Issue 1, p239-248. 10p.
Database: Academic Search Ultimate
Description
ISSN:10584587
DOI:10.1080/10584580600660504