Electrical properties and diffusion behavior of hafnium in single crystal silicon.

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Bibliographic Details
Title:	Electrical properties and diffusion behavior of hafnium in single crystal silicon.
Authors:	Sachdeva, R.^1,2 ravinder1@yahoo.com, Istratov, A.A.^1,2, Deenapanray, P.N.K.³, Weber, E.R.^1,2
Source:	Applied Physics A: Materials Science & Processing. Sep2006, Vol. 84 Issue 4, p351-367. 17p. 3 Diagrams, 4 Charts, 18 Graphs.
Database:	Academic Search Ultimate

Description
ISSN:	09478396
DOI:	10.1007/s00339-006-3637-6