Electrical properties and diffusion behavior of hafnium in single crystal silicon.
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| Title: | Electrical properties and diffusion behavior of hafnium in single crystal silicon. |
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| Authors: | Sachdeva, R.1,2 ravinder1@yahoo.com, Istratov, A.A.1,2, Deenapanray, P.N.K.3, Weber, E.R.1,2 |
| Source: | Applied Physics A: Materials Science & Processing. Sep2006, Vol. 84 Issue 4, p351-367. 17p. 3 Diagrams, 4 Charts, 18 Graphs. |
| Database: | Academic Search Ultimate |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 21509518 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=21509518 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s00339-006-3637-6 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 17 StartPage: 351 Titles: – TitleFull: Electrical properties and diffusion behavior of hafnium in single crystal silicon. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Sachdeva, R. – PersonEntity: Name: NameFull: Istratov, A.A. – PersonEntity: Name: NameFull: Deenapanray, P.N.K. – PersonEntity: Name: NameFull: Weber, E.R. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 09 Text: Sep2006 Type: published Y: 2006 Identifiers: – Type: issn-print Value: 09478396 Numbering: – Type: volume Value: 84 – Type: issue Value: 4 Titles: – TitleFull: Applied Physics A: Materials Science & Processing Type: main |
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