View in EDS

Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics.

Saved in:

Bibliographic Details
Title:	Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics.
Authors:	Cagnat, Nathalie¹, Laviron, Cyrille², Auriac, Nicolas³, Liu, Jinning⁴, Mehta, Sandeep⁴, Frioulaud, Laurent¹, Mathiot, Daniel⁵
Source:	AIP Conference Proceedings. 2006, Vol. 866 Issue 1, p133-136. 4p. 2 Diagrams, 2 Charts, 3 Graphs.
Database:	Academic Search Ultimate

Description
ISSN:	0094243X
DOI:	10.1063/1.2401479