APA (7th ed.) Citation

Cagnat, N., Laviron, C., Auriac, N., Liu, J., Mehta, S., Frioulaud, L., & Mathiot, D. (2006). Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics. AIP Conference Proceedings, 866(1), 133. https://doi.org/10.1063/1.2401479

Chicago Style (17th ed.) Citation

Cagnat, Nathalie, Cyrille Laviron, Nicolas Auriac, Jinning Liu, Sandeep Mehta, Laurent Frioulaud, and Daniel Mathiot. "Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics." AIP Conference Proceedings 866, no. 1 (2006): 133. https://doi.org/10.1063/1.2401479.

MLA (9th ed.) Citation

Cagnat, Nathalie, et al. "Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics." AIP Conference Proceedings, vol. 866, no. 1, 2006, p. 133, https://doi.org/10.1063/1.2401479.