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Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics.

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Title: Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics.
Authors: Cagnat, Nathalie1, Laviron, Cyrille2, Auriac, Nicolas3, Liu, Jinning4, Mehta, Sandeep4, Frioulaud, Laurent1, Mathiot, Daniel5
Source: AIP Conference Proceedings. 2006, Vol. 866 Issue 1, p133-136. 4p. 2 Diagrams, 2 Charts, 3 Graphs.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 23290342
AccessLevel: 2
PubType: Conference
PubTypeId: conference
PreciseRelevancyScore: 0
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  Data: Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics.
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  Data: <searchLink fieldCode="JN" term="%22AIP+Conference+Proceedings%22">AIP Conference Proceedings</searchLink>. 2006, Vol. 866 Issue 1, p133-136. 4p. 2 Diagrams, 2 Charts, 3 Graphs.
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RecordInfo BibRecord:
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        Value: 10.1063/1.2401479
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      – Code: eng
        Text: English
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        PageCount: 4
        StartPage: 133
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      – TitleFull: Defect Behavior in BF2 Implants For S/D Applications as a Function of Ion Beam Characteristics.
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            NameFull: Cagnat, Nathalie
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            NameFull: Laviron, Cyrille
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            NameFull: Liu, Jinning
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            NameFull: Mehta, Sandeep
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              Text: 2006
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              Y: 2006
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