A Characteristic Study of Micromirror with Sidewall Electrodes.
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| Title: | A Characteristic Study of Micromirror with Sidewall Electrodes. |
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| Authors: | Bai, Yanhui1 (AUTHOR) yhbai@engmail.uwaterloo.ca, Yeow, JohnTze Wei1 (AUTHOR), Wilson, BrianCampbell2 (AUTHOR) |
| Source: | International Journal of Optomechatronics. 2007, Vol. 1 Issue 3, p231-258. 28p. 5 Diagrams, 4 Charts, 9 Graphs. |
| Database: | Academic Search Ultimate |
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| ISSN: | 15599612 |
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| DOI: | 10.1080/15599610701548852 |