GROWTH TEMPERATURE DEPENDENCE OF Ga2O3 THIN FILMS DEPOSITED BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION.
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| Title: | GROWTH TEMPERATURE DEPENDENCE OF Ga2O3 THIN FILMS DEPOSITED BY PLASMA ENHANCED ATOMIC LAYER DEPOSITION. |
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| Authors: | Liu, G. X.1,2 gxliucn@yahoo.com, Shan, F. K.1,2 fukaishan@yahoo.com, Lee, W. J.2 leewj@deu.ac.kr, Shin, B. C.2, Kim, S. C.3, Kim, H. S.4, Cho, C. R.5 |
| Source: | Integrated Ferroelectrics. 2007, Vol. 94 Issue 1, p11-20. 10p. 6 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 10584587 |
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| DOI: | 10.1080/10584580701755716 |
