FABRICATION OF FERROELECTRIC PZT THIN FILMS BY LIQUID DELIVERY MOCVD USING NOVEL Zr and Ti PRECURSORS.
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| Title: | FABRICATION OF FERROELECTRIC PZT THIN FILMS BY LIQUID DELIVERY MOCVD USING NOVEL Zr and Ti PRECURSORS. |
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| Authors: | YEH, C. P.1 chia-pin.yeh@student.uni-magdeburg.de, LISKER, M.1, VEZIN, V.2, SEITZINGER, B.2, BAUMANN, P. K.2, GARKE, B.3, BLASING, J.3, KROST, A.3, BURTE, E. P.1 |
| Source: | Integrated Ferroelectrics. 2008, Vol. 104 Issue 1, p16-24. 9p. 1 Black and White Photograph, 1 Diagram, 1 Chart, 3 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 10584587 |
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| DOI: | 10.1080/10584580802554737 |
