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Si/SiC bonded wafer: A route to carbon free SiO2 on SiC.

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Bibliographic Details
Title: Si/SiC bonded wafer: A route to carbon free SiO2 on SiC.
Authors: Pérez-Tomás, A.1,2 amador.perez@cnm.es, Lodzinski, M.3, Guy, O. J.3, Jennings, M. R.1, Placidi, M.2, Llobet, J.2, Gammon, P. M.1, Davis, M. C.1, Covington, J. A.1, Burrows, S. E.4, Mawby, P. A.1
Source: Applied Physics Letters. 3/9/2009, Vol. 94 Issue 10, pN.PAG. 3p. 1 Black and White Photograph, 3 Graphs.
Database: Academic Search Ultimate
Description
ISSN:00036951
DOI:10.1063/1.3099018