Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling.
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| Title: | Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling. |
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| Authors: | Enk, Th., Kra¨mer, M. |
| Source: | Physics of Plasmas. Oct2000, Vol. 7 Issue 10. 2 Diagrams, 3 Charts, 23 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 1070664X |
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| DOI: | 10.1063/1.1288399 |
