Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling.
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| Title: | Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling. |
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| Authors: | Enk, Th., Kra¨mer, M. |
| Source: | Physics of Plasmas. Oct2000, Vol. 7 Issue 10. 2 Diagrams, 3 Charts, 23 Graphs. |
| Database: | Academic Search Ultimate |
| FullText | Text: Availability: 0 |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 4416904 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Enk%2C+Th%2E%22">Enk, Th.</searchLink><br /><searchLink fieldCode="AR" term="%22Kra¨mer%2C+M%2E%22">Kra¨mer, M.</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Physics+of+Plasmas%22">Physics of Plasmas</searchLink>. Oct2000, Vol. 7 Issue 10. 2 Diagrams, 3 Charts, 23 Graphs. |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=4416904 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.1288399 Languages: – Code: eng Text: English Titles: – TitleFull: Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Enk, Th. – PersonEntity: Name: NameFull: Kra¨mer, M. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 10 Text: Oct2000 Type: published Y: 2000 Identifiers: – Type: issn-print Value: 1070664X Numbering: – Type: volume Value: 7 – Type: issue Value: 10 Titles: – TitleFull: Physics of Plasmas Type: main |
| ResultId | 1 |