Chemical characterization of as-deposited microcrystalline indium oxide films prepared by reactive dc magnetron sputtering.

Saved in:

Bibliographic Details
Title:	Chemical characterization of as-deposited microcrystalline indium oxide films prepared by reactive dc magnetron sputtering.
Authors:	Xirouchaki, C., Moschovis, K., Chatzitheodoridis, E., Kiriakidis, G., Morgen, P.
Source:	Applied Physics A: Materials Science & Processing. 1998, Vol. 67 Issue 3, p295. 7p.
Database:	Academic Search Ultimate

Description
ISSN:	09478396
DOI:	10.1007/s003390050774