Diffusion of TiN into aluminum films measured by soft x-ray spectroscopy.
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| Title: | Diffusion of TiN into aluminum films measured by soft x-ray spectroscopy. |
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| Authors: | Schuler, T. M., Ederer, D. L., Ruzycki, N., Glass, G., Hollerman, W. A., Moewes, A., Kuhn, M., Callcott, T. A. |
| Source: | AIP Conference Proceedings. 2001, Vol. 576 Issue 1, p548. 7p. |
| Database: | Academic Search Ultimate |
| ISSN: | 0094243X |
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| DOI: | 10.1063/1.1395369 |
