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Diffusion of TiN into aluminum films measured by soft x-ray spectroscopy.

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Title: Diffusion of TiN into aluminum films measured by soft x-ray spectroscopy.
Authors: Schuler, T. M., Ederer, D. L., Ruzycki, N., Glass, G., Hollerman, W. A., Moewes, A., Kuhn, M., Callcott, T. A.
Source: AIP Conference Proceedings. 2001, Vol. 576 Issue 1, p548. 7p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 5663988
AccessLevel: 2
PubType: Conference
PubTypeId: conference
PreciseRelevancyScore: 0
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  Data: Diffusion of TiN into aluminum films measured by soft x-ray spectroscopy.
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  Data: <searchLink fieldCode="JN" term="%22AIP+Conference+Proceedings%22">AIP Conference Proceedings</searchLink>. 2001, Vol. 576 Issue 1, p548. 7p.
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        Value: 10.1063/1.1395369
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        Text: English
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      – TitleFull: Diffusion of TiN into aluminum films measured by soft x-ray spectroscopy.
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            NameFull: Schuler, T. M.
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            NameFull: Ruzycki, N.
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              Text: 2001
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