View in EDS

Interactions of thin Ti films with Si, SiO2, Si3N4, and SiOxNy under rapid thermal annealing.

Saved in:
Bibliographic Details
Title: Interactions of thin Ti films with Si, SiO2, Si3N4, and SiOxNy under rapid thermal annealing.
Authors: Morgan, A. E., Broadbent, E. K., Ritz, K. N., Sadana, D. K., Burrow, B. J.
Source: Journal of Applied Physics. 7/1/1988, Vol. 64 Issue 1, p344. 10p.
Database: Academic Search Ultimate
FullText Text:
  Availability: 0
Header DbId: asn
DbLabel: Academic Search Ultimate
An: 7647996
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Interactions of thin Ti films with Si, SiO2, Si3N4, and SiOxNy under rapid thermal annealing.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Morgan%2C+A%2E+E%2E%22">Morgan, A. E.</searchLink><br /><searchLink fieldCode="AR" term="%22Broadbent%2C+E%2E+K%2E%22">Broadbent, E. K.</searchLink><br /><searchLink fieldCode="AR" term="%22Ritz%2C+K%2E+N%2E%22">Ritz, K. N.</searchLink><br /><searchLink fieldCode="AR" term="%22Sadana%2C+D%2E+K%2E%22">Sadana, D. K.</searchLink><br /><searchLink fieldCode="AR" term="%22Burrow%2C+B%2E+J%2E%22">Burrow, B. J.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>. 7/1/1988, Vol. 64 Issue 1, p344. 10p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=7647996
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.341434
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 10
        StartPage: 344
    Titles:
      – TitleFull: Interactions of thin Ti films with Si, SiO2, Si3N4, and SiOxNy under rapid thermal annealing.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Morgan, A. E.
      – PersonEntity:
          Name:
            NameFull: Broadbent, E. K.
      – PersonEntity:
          Name:
            NameFull: Ritz, K. N.
      – PersonEntity:
          Name:
            NameFull: Sadana, D. K.
      – PersonEntity:
          Name:
            NameFull: Burrow, B. J.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 07
              Text: 7/1/1988
              Type: published
              Y: 1988
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 64
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1