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Electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon: The effect of deposition temperature.

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Bibliographic Details
Title: Electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon: The effect of deposition temperature.
Authors: Burger, W. R., Reif, R.
Source: Journal of Applied Physics. 1/15/1988, Vol. 63 Issue 2, p368. 15p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 7653747
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PubType: Academic Journal
PubTypeId: academicJournal
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon: The effect of deposition temperature.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Burger%2C+W%2E+R%2E%22">Burger, W. R.</searchLink><br /><searchLink fieldCode="AR" term="%22Reif%2C+R%2E%22">Reif, R.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>. 1/15/1988, Vol. 63 Issue 2, p368. 15p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=7653747
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.340248
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 15
        StartPage: 368
    Titles:
      – TitleFull: Electrical quality of low-temperature (Tdep≤800 °C) epitaxial silicon: The effect of deposition temperature.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Burger, W. R.
      – PersonEntity:
          Name:
            NameFull: Reif, R.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 01
              Text: 1/15/1988
              Type: published
              Y: 1988
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 63
            – Type: issue
              Value: 2
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1