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Photonometers for coating and sputtering machines.

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Bibliographic Details
Title: Photonometers for coating and sputtering machines.
Authors: Oupický, P.1, Jareš, D.1, Václavík, J.1, Vápenka, D.1
Source: EPJ Web of Conferences. 2013, Issue 48, pp.1-p.4. 4p.
Database: Academic Search Ultimate
Description
ISSN:21016275
DOI:10.1051/epjconf/20134800018