Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.
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| Title: | Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology. |
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| Authors: | Idir, Mourad1, Dovillaire, Guillaume2, Mercere, Pascal3 |
| Source: | Synchrotron Radiation News. Sep/Oct2013, Vol. 26 Issue 5, p23-29. 7p. |
| Database: | Academic Search Ultimate |
| ISSN: | 08940886 |
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| DOI: | 10.1080/08940886.2013.832587 |
