APA (7th ed.) Citation

Idir, M., Dovillaire, G., & Mercere, P. (2013). Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology. Synchrotron Radiation News, 26(5), 23. https://doi.org/10.1080/08940886.2013.832587

Chicago Style (17th ed.) Citation

Idir, Mourad, Guillaume Dovillaire, and Pascal Mercere. "Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology." Synchrotron Radiation News 26, no. 5 (2013): 23. https://doi.org/10.1080/08940886.2013.832587.

MLA (9th ed.) Citation

Idir, Mourad, et al. "Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology." Synchrotron Radiation News, vol. 26, no. 5, 2013, p. 23, https://doi.org/10.1080/08940886.2013.832587.