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Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.

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Bibliographic Details
Title: Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.
Authors: Idir, Mourad1, Dovillaire, Guillaume2, Mercere, Pascal3
Source: Synchrotron Radiation News. Sep/Oct2013, Vol. 26 Issue 5, p23-29. 7p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 90412725
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Idir%2C+Mourad%22">Idir, Mourad</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22Dovillaire%2C+Guillaume%22">Dovillaire, Guillaume</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AR" term="%22Mercere%2C+Pascal%22">Mercere, Pascal</searchLink><relatesTo>3</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Synchrotron+Radiation+News%22">Synchrotron Radiation News</searchLink>. Sep/Oct2013, Vol. 26 Issue 5, p23-29. 7p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=90412725
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1080/08940886.2013.832587
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 7
        StartPage: 23
    Titles:
      – TitleFull: Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Idir, Mourad
      – PersonEntity:
          Name:
            NameFull: Dovillaire, Guillaume
      – PersonEntity:
          Name:
            NameFull: Mercere, Pascal
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 09
              Text: Sep/Oct2013
              Type: published
              Y: 2013
          Identifiers:
            – Type: issn-print
              Value: 08940886
          Numbering:
            – Type: volume
              Value: 26
            – Type: issue
              Value: 5
          Titles:
            – TitleFull: Synchrotron Radiation News
              Type: main
ResultId 1