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Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.

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Bibliographic Details
Title: Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology.
Authors: Idir, Mourad1, Dovillaire, Guillaume2, Mercere, Pascal3
Source: Synchrotron Radiation News. Sep/Oct2013, Vol. 26 Issue 5, p23-29. 7p.
Database: Academic Search Ultimate
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