Atomic layer deposition of Zn1−xMgxO:Al transparent conducting films.
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| Title: | Atomic layer deposition of Zn |
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| Authors: | Luka, G.1 gluka@ifpan.edu.pl, Witkowski, B. S.1, Wachnicki, L.1, Goscinski, K.1, Jakiela, R.1, Guziewicz, E.1, Godlewski, M.1,2, Zielony, E.3, Bieganski, P.3, Placzek-Popko, E.3, Lisowski, W.4, Sobczak, J. W.4, Jablonski, A.4 |
| Source: | Journal of Materials Science. Feb2014, Vol. 49 Issue 4, p1512-1518. 7p. 1 Diagram, 2 Charts, 7 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 00222461 |
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| DOI: | 10.1007/s10853-013-7832-5 |
