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CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth.

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Bibliographic Details
Title: CO2-Laser Flash Evaporation as Novel CVD Precursor Delivery System for Functional Thin Film Growth.
Authors: Loho, Christoph1 cloho@nano.tu-darmstadt.de, Darbandi, Azad J.1,2, Djenadic, Ruzica1,3, Clemens, Oliver1,2, Hahn, Horst1,2,3
Source: Chemical Vapor Deposition. Jun2014, Vol. 20 Issue 4-6, p152-160. 9p.
Database: Academic Search Ultimate
Description
ISSN:09481907
DOI:10.1002/cvde.201307089