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Reliability-based optimization of chemical vapour deposition process.

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Bibliographic Details
Title: Reliability-based optimization of chemical vapour deposition process.
Authors: George, Pradeep1, Po Ting Lin1, Hae Chang Gea1, Yogesh Jaluria1
Source: International Journal of Reliability & Safety. 2009, Vol. 3 Issue 4, p4-4. 1p.
Database: Business Source Ultimate
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