The application of response surface and robust design methods to semiconductor process and device simulation
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| Title: | The application of response surface and robust design methods to semiconductor process and device simulation |
|---|---|
| Authors: | Jones, Kenneth L. |
| Committee Members: | Liou, Juin J. |
| Summary: | This thesis describes the application of response surface methods and robust design methods to the simulation of a CMOS semiconductor process and devices. The problem addressed involves five processing input variables, four process noise variables and four responses. In the use of robust design method, it is shown how a scoring function can be utilized to assist in the selection of an optimum operating point. The robust design application selects an operating point based on centering the.process mean and minimizing the sensitivity of the process to variability in the process. Both methods are shown to provide satisfactory results. |
| URL: | https://stars.library.ucf.edu/rtd/3858 |
| Database: | OpenDissertations |
| FullText | Text: Availability: 0 |
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| Header | DbId: ddu DbLabel: OpenDissertations An: ddu.oai.stars.library.ucf.edu.rtd.4857 AccessLevel: 6 PubType: Dissertation/ Thesis PubTypeId: dissertation PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: The application of response surface and robust design methods to semiconductor process and device simulation – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Jones%2C+Kenneth+L%2E%22">Jones, Kenneth L.</searchLink> – Name: Author Label: Committee Members Group: Au Data: <searchLink fieldCode="CO" term="%22Liou%2C+Juin+J%2E%22">Liou, Juin J.</searchLink> – Name: Abstract Label: Summary Group: Ab Data: This thesis describes the application of response surface methods and robust design methods to the simulation of a CMOS semiconductor process and devices. The problem addressed involves five processing input variables, four process noise variables and four responses. In the use of robust design method, it is shown how a scoring function can be utilized to assist in the selection of an optimum operating point. The robust design application selects an operating point based on centering the.process mean and minimizing the sensitivity of the process to variability in the process. Both methods are shown to provide satisfactory results. – Name: URL Label: URL Group: URL Data: <link linkTarget="URL" linkTerm="https://stars.library.ucf.edu/rtd/3858" linkWindow="_blank">https://stars.library.ucf.edu/rtd/3858</link> |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=ddu&AN=ddu.oai.stars.library.ucf.edu.rtd.4857 |
| RecordInfo | BibRecord: BibEntity: Languages: – Code: eng Text: English Subjects: – SubjectFull: Response surface methodology Type: general – SubjectFull: Robust design scoring function Type: general – SubjectFull: CMOS process parameter optimization Type: general – SubjectFull: Process variability and noise factors Type: general – SubjectFull: MOSFET device simulation Type: general – SubjectFull: Electrical and Computer Engineering Type: general – SubjectFull: Engineering Type: general – SubjectFull: Dissertations; Academic -- Engineering; Engineering -- Dissertations; Academic; Response surfaces (Statistics)--Computer programs; Microelectronics--Simulation methods; Semiconductors--Statistical methods; Metal oxide semiconductors, Complementary--Computer-aided design; Robust optimization Type: general Titles: – TitleFull: The application of response surface and robust design methods to semiconductor process and device simulation Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Jones, Kenneth L. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 01 Type: published Y: 1991 |
| ResultId | 1 |
